EUV deal raises questions

Is EUV lithography ready for making semiconductors?

Analysts gave mixed reactions to news ASML Holdings NV has sold 15 EUV lithography systems to a US customer.

Few doubt Intel is the buyer, but the terms of the deal and what it says about the readiness of EUV for making semiconductors remains unclear.

Although in the works for decades, EUV lithography has so far failed to deliver the kind of throughput needed to make leading-edge chips due to a relatively weak light source. The company announced several improvements to the system along the way, but the latest results were still below production targets.

Just last fall, Intel Fellow Mark Bohr said EUV is "not ready yet -- the throughput and reliability are not there," he said speaking at the annual Intel Developer Forum.

At that event, Bohr said Intel sees a way to make 7nm chips cost effectively without EUV. Earlier, he had said the same about 10nm, although the company has yet to reveal details on either process node.

Sources agree Intel is the existing US customer that ASML referred to as the buyer in an ASML press release. However, one analyst speculates that it is a long-term deal in which 10 of the 15 systems will not be delivered until 2017 or later. The analyst, who asked not to be named, suggested the deal is an effort by Intel to pump up the stock price of ASML in which it holds a 15 percent stake.

Others took a more upbeat view. "It is far too late for Intel to use EUV at 10nm, but the timing seems reasonable for 7nm," said David Kanter of Real World Technologies.

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