MEMS process used for sensors miniaturization

MEM sensors R&D and production focus is on consumer electronics, especially smartphones and wearable devices.

As smaller but powerful devices continue to gain traction in the electronics industry, suppliers of sensors in China are taking advantage of MEMS technology to achieve greater miniaturization.

Local companies focus on consumer electronics, in particular mobile and wearable devices, with current output consisting of entry-level and midrange units.

To release more advanced variants and keep up with developments in these applications, they will pursue the trends associated with this microfabrication process, which include low power consumption in addition to further integration and miniaturization.

MEMIC, one of the largest suppliers of MEMS sensors in China, has released a new-generation of magnetometers. Designed mainly for smartphones, the components incorporate an ASIC and a three-axis anisotropic magnetoresistance magnetic sensor into a single chip measuring 0.8x0.8x0.4mm. These exhibit enhanced sensitivity and reduced noise.

The company has also introduced MEMS sensors for use in vehicles, industrial equipment and drones, and plans to mass-produce them in the next one or two years.

In the future, more China makers will target opportunities in the automotive, medical, military and industrial fields. Together with consumer electronics, these markets have been driving demand for the category, which fast-tracked growth in recent years.

Market rise

Based on MEMS sensors shipments, smartphones and tablet PCs account for nearly 90 percent of the total for the consumer electronics segment. Volume is estimated to have reached 18.9 billion units in 2019 from 5.8 billion in 2013.

In terms of rate of increase, however, medical equipment posted the highest among terminal applications between 2013 and 2019. The CAGR is 30 percent, having climbed to $7.2 billion from $2.5 billion during the period.

Global statistics from Yole Développement peg the MEMS sensors market at $13 billion in 2014 and $22.5 billion in 2018, benefiting primarily from the consumer electronics and secondly the automotive sectors. Sensing components for the first registered about 19 percent CAGR from 2013 to 2018, hitting $6.4 billion in 2018.

In China, there was also high growth in aggregate sales value,a trend expected to persist in the years ahead. The local MEMS sensors line achieved $7.4 billion in 2018 and is projected to touch $12.5 billion in 2021, according to Elecfans.

The upbeat outlook for the category has been encouraging China manufacturers to bolster production volume. Wuhu CFSensor Co. Ltd raised output by 20 percent in 2019 and will do so again in the months ahead. The supplier exports nearly all products worldwide, with the US, South Korea and India among key destinations. It foresees a 15 to 20 percent increase in overseas deliveries in coming months.

Supplier pool

About 200 companies make up the MEMS sensors manufacturing industry in China. Most are local operations that are small and midsize.

The homegrown leaders include ACC, Goertek, MEMSIC, Senodia and MiraMEMS. The first three are among the world’s top 50 MEMS sensors suppliers. Goertek is the third-largest maker of MEMS microphones globally.

The foreign companies in China are also major industry players such as Bosch, STMicroelectronics, TI, HP and Knowles.

More than half of the makers gather in the Yangtze River Delta region, specifically in Jiangsu and Zhejiang provinces. The two areas account for about 30 and 10 percent of the pool, while the province of Guangdong in the Pearl River Delta region has 15 percent.

New entrants from home and abroad are expected to flock to these production hubs.

Mainstream MEMS sensors

China companies offer mainly MEMS microphones, gyroscopes, pressure sensors, magnetometers and accelerometers, with the first three leading shipments.

Units for consumer electronics represent more than 80 percent of deliveries.

In future, makers look to widen their selections to include a greater number of midlevel and high-end products. They will enhance customization capability to handle any specifications.

The key components in the manufacture of MEMS sensors include chips, and sensing and passive components. The first comes from foreign providers, mainly Infineon, Freescale, Bosch, TI and Sensata. The other inputs are sourced locally or abroad, depending on customers’ requests.

The cost of components rose slightly in 2019, leading to a corresponding adjustment in product prices. Some suppliers, however, kept their quotes unchanged to boost orders.

In the months ahead, input outlay and MEMS sensors rates are anticipated to become stable.

The products in this gallery have been handpicked by our China-based market analyst for representing current trends in MEMS sensors from China makers.

MEMS pressure sensor operates in -40 to 135 C

This MEMS pressure sensor from Holykell Technology Co. Ltd, HPT300-P3 model, has -1 to 0 bar or 1 to 100 bar measuring range, 300 percent full-scale or FS overload and 0.1 percent FS standard repeatability. The unit with overvoltage protection at 15 or 36VDC runs on 11 to 33VDC, 18 to 33VDC or 4.5 to 6VDC and has 0 to 5 or 10V or 0.5 to 4.5V, 4 to 20mA output. It operates in -40 to 135 C.

An order of at least 100 units is for delivery within 7 days.

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MEMS pressure sensor in up to 100mPa variants

In 1, 2.5, 4, 6, 10, 16, 25, 40, 60 and 100mPa versions, this MEMS pressure sensor from Nanjing Wotian Technology Co. Ltd, WT13-20140819 model, has 200 percent FS overpressure at less than 25mPa or 150 percent at e25mPa, and ±0.25 percent typical FS accuracy. The CE-marked unit with a 13mm sensor has ±2mV zero and 100mV typical span outputs.

The minimum order is 5 units for delivery within 7 days.

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MEMS gas sensor with up to 10,000ppm range

For home- and commercial-use gas leakage monitoring devices, and fire and security detection systems, the model GM-597B MEMS gas sensor from Strong Electronics & Technology Ltd can detect up to 10,000ppm methane and propane.

The maker requires at least 1,000 units for this ceramic-encapsulated model. Delivery lead time is 10 days.

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MEMS pressure sensor

From Wuhu CFSensor Co. Ltd, model XGZP6867A MEMS pressure sensor with 0 to 10 or 700kPa measuring range suits household appliances, pumps and instruments. The 7.3x7.3x9.69mm unit with 0.5 to 4.5V voltage output signal has 0 to 60 C compensation temperature.

The 10-unit minimum order is for delivery in 7 days.

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